Shenzhen HongJie Water Technology Co., Ltd.
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Easy To Install Industrial Water Filter System 90t/H Ultra Pure Water System For Preparation Of Electronic-Grade Chemicals
I. Overview
Ultra-pure water is an indispensable raw material in the preparation of electronic-grade chemicals (such as high-purity etching solutions, photoresists, and CMP slurries). Its purity directly affects the control of metal impurities, particle size distribution, and batch stability in electronic chemicals.
In the preparation of electronic-grade chemicals, ultra-pure water is not only a solvent but also a molecular-level clean reaction environment (extreme purification, system anti-pollution, performance engine).
II. Process
Raw Water → Pretreatment: UF + Softening → Primary RO → Secondary RO → Membrane Degassing→ EDI → UV + TOC Degradation → Ultra - precision Mixed Bed( Nuclear - Grade Resin) → Terminal Ultrafiltration(0.01 μm )→ Nitrogen - Sealed Circulation
III. Ultra-pure water limit parameters (SEMI C63 standard)
| Parameter | Standard Requirement | ||||
| Resistivity (25°C) | ≥18.24 MΩ·cm | ||||
| TOC | <0.1 ppb | ||||
| Dissolved Oxygen (DO) | <0.5 ppb | ||||
| Particles (≥0.05μm) | <0.5 particles/mL | ||||
| Trace Metals | |||||
| - Na⁺/K⁺ | ≤0.01 ppt | ||||
| - Fe/Cu/Ni | ≤0.02 ppt | ||||
| - B | ≤0.005 ppt | ||||
| Anions (Cl⁻/SO₄²⁻) | ≤0.01 ppt | ||||
IV. Application Scenarios
Wet electronic chemicals (hydrofluoric acid, ammonia water)
Lithography materials (EUV photoresist, developer)
CMP polishing slurry (silicon dioxide/cerium oxide slurry)
Electroplating solution (electroplating solution)
V. Here is a guideline for you to get a proper quotation
Tell us the raw water/source of water(tap water, well water, or sea water, etc)
Provide water analysis report(TDS , conductivity, or resistivity, etc)
Required production capacity( 5m³/H, 50m³/H,or 500m³/H, etc)
What's the pure water used for( industrial,Food and Beverage,or agriculture, etc )