Ultra-Pure Water System for Semiconductor Industry
Designed specifically for precision cleaning in semiconductor manufacturing, our system delivers water purity that meets rigorous industry standards, including:
- ASTM (American Society for Testing and Materials)
- GB/T 11446.1-2013 (Chinese Electronic Grade Water Standards: 18MΩ·cm, 15MΩ·cm, 10MΩ·cm, 2MΩ·cm, 0.5MΩ·cm)
- Semiconductor Equipment and Materials International (SEMI) Standards
- Integrated Circuit (IC) Manufacturing Specifications
Standard Configuration:
Raw Water → Raw Water Tank → Booster Pump → Flocculant/Reducer Dosing → Activated Carbon Filter → Ultrafiltration (UF) → Scale Inhibitor Dosing → Security Filter → 1st Stage High-Pressure Pump → 1st Stage RO → pH Adjustment → Intermediate Tank → 2nd Stage High-Pressure Pump → 2nd Stage RO → Purified Water Tank → EDI Booster Pump → UV Sterilizer → Cartridge Filter → EDI System → Ultra-Pure Water Tank → Transfer Pump → TOC Removal Unit → Polishing Resin → Final Filter → Point of Use
Process Highlights:
- Multi-Stage Pretreatment: Removes particles, organics, and chlorine to protect RO membranes.
- Dual RO System: Achieves salt rejection rate for consistent high-purity water.
- EDI Technology: Continuous electro-deionization eliminates the need for chemical regeneration.
- Polishing Resin: Final purification stage for ultralow TOC and ionic contaminants
| Item | Specification |
| Electricity Supply | 380V |
| Produced Water Quality | Resistivity ≥15-18.25 MΩ·cm |
| Core Technology | Double-pass Reverse Osmosis + EDI + Polishing Resin |
| Key Components | RO Membrane Modules, EDI Units |
| Operation Mode | Full Automatic (PLC-controlled) |
| Product Features | Stable Water Quality,Low Operation Cost,Reliable Performance |
| After-Sales Service | 2-Year Warranty For Standard Equipment |
EDI Photo:
RO Photo:
Details of other process equipment:
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Fully Automated Control:
- Automatic backwash and regeneration cycles.
- Manual override option for maintenance.
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Factory-Integrated Wiring:
- Pre-wired components reduce on-site installation time .
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Advanced Maintenance Features:
- RO chemical cleaning system extends membrane life.
- Recirculation loops ensure water quality stability.
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Premium Materials:
- 304 stainless steel and UPVC piping for corrosion resistance.
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Intuitive Operation:
- Integrated control panel with real-time monitoring.
- Remote access option for troubleshooting.
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Low Maintenance:
- Durable components designed for continuous operation.
V.Here is a guideline for you to get a proper quotation
Tell us the raw water/source of water(tap water, well water, or sea water, etc)
Provide water analysis report(TDS , conductivity, or resistivity, etc)
Required production capacity( 5m³/H, 50m³/H,or 500m³/H, etc)
What's the pure water used for( industrial,Food and Beverage,or agriculture, etc )
