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Custom 70 tons per hour industrial ultra pure water treatment system for the electronics industry
I. Overview
Ultra-pure water (UPW) is the lifeline of semiconductor, display panel, and integrated circuit manufacturing in the electronics industry. It is the “invisible chip” of electronics manufacturing, relied upon for its extreme purity in everything from nanoscale cleaning to atomic-level deposition. Its purity directly affects product yield and performance.
II. Main process
Raw Water→Pretreatment(Coagulation + Sedimentation + Filtration)→Primary RO→Secondary RO→Degassing→EDI→UV Sterilization→Ultrafiltration→Polishing Mix Bed→Final Filtration→water outlet
III. Parameters
Resistivity | 18.2 MΩ·cm(25°C) | |||
TOC | 0.5 ppb | |||
Dissolved oxygen | 5 ppb | |||
RO recovery rate | >85% | |||
RO desalination Rate | 99.50% |
IV. The core role of ultrapure water in electronics manufacturing
Wafer cleaning
Etching/lithography
Chemical mechanical polishing
Ion implantation
Vapor oxidation
V. Here is a guideline for you to get a proper quotation
Tell us the raw water/source of water(tap water, well water, or sea water, etc)
Provide water analysis report(TDS , conductivity, or resistivity, etc)
Required production capacity( 5m³/H, 50m³/H,or 500m³/H, etc)
What's the pure water used for( industrial,Food and Beverage,or agriculture, etc )